Micro electro-mechanical Systems (MEMS), the technology of microscopic devices with moving parts, are finding new range of applications in the recent past due to the trend of ‘miniaturization’. They are increasingly being applied to an array of sensor technologies, including gas sensors. However, for MEMS based gas sensors to detect small traces of gases, they need to operate at higher temperatures. Now, researchers have designed a microheater made of molybdenum, which can successful provide the required range of temperature for the sensor to operate.